Fastech

Far-reaching range of Fastech Closed Loop 2-Phase Stepping Systems.

S-SERVO

Stepping Motor Control System Without Step Out

S-SERVO adopted closed loop stepping motor system which perfectly resolves the problems of current open loop control stepping motor system such as Step Out and Positioning Completion Check. Regardless of motor type (2 Phase, 5 Phase), position precision only related to encoder so High Precision Positioning is always possible. Existing step driver resolution can be heated easily because of Constant Current goes into the motor regardless of loads magnitude. But S-SERVO enables to reduce high temperature of the motor and save energy usage.
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Spec
Motor Model SM-20 series SM-28 series SM-35 series SM-42 series SM-56 series SM-60 series
Drive Type SV-PD-20 series SV-PD-28 series SV-PD-35 series SV-PD-42 series SV-PD-56 series SV-PD-60 series
SV-PD-MI-20 series SV-PD-MI-28 series SV-PD-MI35 series SV-PD-MI42 series - -
Input Voltage
24VDC ±10%
Control Method Closed Loop control by ARM-based 32-bit MCU

Current Consumption Max 500mA (Except motor current)

Operating Condition Temperature

In use : 0~50℃ In Storage : -20~70℃

Humidity

In use : 35~85%RH (Non-condensing) In Storage : 10~90%RH (Non-condensing)

Vib. Resist

0.5G

Functions Rotation Speed

0~3,000rpm

Resolution(P/R)

500, 1,000, 1,250, 2,500, 4,000, 5,000, 10,000, 12,500, 20,000, 25,000, 40,000, 50,000, 62,500, 100,000, 125,000
(Selectable by DIP switch)

Maximum Input

500KHz(Duty 50%)

Protection Function

Over current, Over speed, Position traking error, Over load, Over temperature, Over regenerated voltage,
Motor connection error, Encoder connecrion error, Motor voltage error, In-position error, ROM error, Position
overflow error

LED Display

Power status, In-position status, Enable status, Alarm status

STOP Current

20%~100% (Setting by using GUI)
When motor stop operation. 0.1 second after motor current will be set to STOP current value. STOP current
value is a percentage of tge rated current of motor. * Default : 50%

Pulse Input Method

1-Pulse/2-Pulse (Selectable by DIP switch)

Rotational Direction

CW/CCW (Selectable by DIP switch)

Speed/Position Control Command

Pulse input

Input
·
Output
Signal
Input Signal Functions

Position command pulse, Enable, Alarm reset (Photocoupler input)

Output Signal Functions

In-Position, Alarm (Photocoupler output)

*1 Maximum speed is variable according to resolution. Maximum speed is 3,000rpm untill resolution 10,000. Over the 10,000 resolution, maximum rota
tion speed will be reduced. Calculation is as follows
Maximum rotation speed = 500KHz / Resolution X 60
*2 Please reter to「Setting and operating」(18 Page) to obtain detailed function information.
*3 Please reter to「Control Input/Output explanation」(28Page) to obtain detailed Input/Output signal infomation.
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Ezi-SERVO ST-AC Closed Loop Stepping System

High Efficiency, Low Temperature and HIgh Torque of Ezi-SERVO AC Input Drive enables customer to freely select input voltage between 110~220VAC and realizes High Efficiency and Low Temperature performance by optimized current consumption with automatic motor current control technology according to speed and motor current. Also with regenerative voltage control at a high speed operation, Ezi-SERVO AC Input Drive enables excellent performance at high speed and also possible to match up with Min. 42mm~Max. 60mm size of Ezi-SERVO motor series.
  • Free Voltage (100~230VAC)
  • High Torque Performance at High Speed (Compensate Back-EMF at High Speed)
  • Reduce Motor Temperature and Save Energy (Current Control according to Load)
  • Boost Current Control to Improve Torque (Max. 150% Current Control)
  • Various Motor Line Up (42, 56, 60mm)
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Spec
Motor Model

EzM-42 series

EzM-56 series
EzM-60-3A series
Drive Model

EzS-ACD-42
series

EzS-ACD-56
series
EzS-ACD-60
series
Input Voltage
110~230VAC
Control Method PWM Bipolar Control Method
Current Consumption Max. 500mA (Except motor current)

Environment

Temperature

In-Use : 0~50℃ (Non-Condensing)

In-Storage : -20~70℃ (Non-Condensing)

Humidity

In-Use : 35~85%RH (Non-Condensing)

In-Storage : 10~90%RH (Non-Condensing)

Vib. Resist

0.5G

Function Rotation Speed

1~3,000rpm

Resolution[P/R]

10,000/Rev. Encoder Model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000

20,000/Rev. Encoder Model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 20,000

32,000/Rev. Encoder Model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 32,000

(Selectable with Rotary Switch)

Max. Input

500KHz (Duty 50%)

Protection
Functions

Over Current Error, Over Speed Error, Position Tracking Error, Over Load Error,
Over Temperature Error, Over Regenerated Voltage Error, Motor Connect Error,
Encoder Connect Error, In-Position Error, ROM Error, Position Overflow Error

LED Display

Power status, In-Position Status, Servo On Status, Alarm Status

In-Position
Selection

0~63 (Set by Parameter) * Default Value : 0

Position Gain
Selection

0~63 (Set by Parameter) * Default Value : 0

Pulse Input
Method

1-Pulse/2-Pulse (Selectable with Rotary Switch) * Default Value : 2-Pulse

Rotational
Direction

CW/CCW (Selectable with Rotary Switch) * Default Value : CW

Speed/Position Control Command

Pulse Train Input

I/O Signal

Input Signals Position Command Pulse, Servo On/Off, Alarm Reset (Photocoupler Input)
Output Signals In-Position, Alarm (Photocoupler Input)
Encoder Signal (A+, A-, B+, B-, Z+, Z-, 26C31 of Equivalent) (Line Driver Output)
Dimension(mm) 175(W)x124.5(D)x45(H)
Weight(g) 680 (Drive)
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Ezi-SERVO ST Closed Loop Stepping System

Innovative closed loop stepping motor control system which utilizes a high resolution encoder to update the motor position every 25 micro-seconds. Using high performance DSP technology (Digital Signal Processor) and software, the drive ensures exact position, no overshooting and smooth motion. It is very innovative closed loop stepping control system which is best selection for Vision Inspection Application.
  • Closed Loop System
  • No Gain Tuning
  • No Hunting
  • High Resolution (10,000/16,000/20,000/32,000[ppr])
  • Fast Response
  • High Torque
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Spec
Motor Model

EzM-20

series

EzM-25

series

EzM-28

series

EzM-35

series

EzM-42

series

EzM-56

series

EzM-60

series

EzM-71

series

EzM-86

series

Driver Model

EzS-PD-20

series

EzS-PD-25

series

EzS-PD-28

series

EzS-PD-35

series

EzS-PD-42

series

EzS-PD-56

series

EzS-PD-60

series

EzS-PD-71

series

EzS-PD-86

series

Input Voltage
24VDC ±10%
40~70VDC
Control Method Close Loop control with 32bit DSP
Current Consumption Max 500mA (Except motor current)

Operating Condition

Ambient

Temperature

In Use: 0~50℃

In Storage: -20~70℃

Humidity

In Use: 35~85%RH (Non-Condensing)

In Storage: 10~90%RH (Non-Condensing)

Vib. Resist.

0.5G

Function Rotation Speed

0~3,000rpm

Resolution(P/R) 4,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 4,000

10,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000

16,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 16,000

20,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 20,000

32,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 32,000

(Selectable with rotary switch)

Max.Input Pulse

Frequency

500KHz (Duty 50%)

Protection

Functions

Over Current Error, Over Speed Error, Position Tracking Error, Over Load Error, Over Temperature Error,

Over Regenerated Voltage Error, Motor Connect Error, Encoder Connect Error, Motor Voltage Error,

In-Position Error, System Error, ROM Error, Input Voltage Error, Position Overflow Error

LED Display

Power status, In-Position status, Servo On status, Alarm status

In-Position

Selection

0~F (Selectable with Rotary Switch)

Position Gain

Selection

0~F (Selectable with Rotary Switch)

Pulse Input Method

1-Pulse/2-Pulse (Selectable with DIP Switch)

Rotational Direction

CW/CCW (Selectable with DIP Switch)

Speed/Position

Control Command

Pulse train input

I/O
Signal

Input Signals Position command pulse, Servo On/Off, Alarm reset (Photocoupier input)
Output Signals In-Position, Alarm (Photocoupier output)

Encoder Signal(A+, A-, B+, B-, Z+, Z-, 26C31 of Equivalent) (Line driver output)

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Ezi-SERVO BT Closed Loop Stepping System

Innovative integrated stepping motor and drive system in one robust package! A high resolution encoder updates the motor position every 25 micro-seconds to the integrated drive. Optimizing high performance DSP technology (Digital SignalProcessor) and proprietary software, the drive ensures exact position, no overshooting and smooth motion at 100% of load.
  • Motor + Encoder + Drive
  • Fast Response
  • Closed Loop System
  • High Torque
  • No Gain Tuning
  • No Hunting
  • High Resolution (10,000/20,000[ppr])
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Spec

Ezi-SERVO BT Closed Loop Stepping System

Input Voltage 24VDC ±10%
Control Method Closed Loop control with 32bit DSP
Current Consumption Max 500mA (Except motor current)

Operating

Condition

Ambient
Temperature
In use : 0~50℃ In Storage: -20~70℃
Humidity In use : 35~85%RH In Storage: 10~90%RH
Vib. Resist. 0.5G
Function Rotation Speed 0~3,000rpm
Resolution(P/R)

10,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000

20,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 20,000

(Selectable with Rotary Switch)

Max. Input Pulse

Frequency

500KHz (Duty 50%)

Protection

Functions

Over Current Error, Over Speed Error, Position Tracking Error, Over Load Error, Over Temperature Error,

Over Regenerated Voltage Error, Motor Connect Error, Encoder Connect Error, Motor Voltage Error,

In-Position Error, System Error, ROM Error, Position Overflow Error

In-Position Selection 0~F (Selectable with Rotary Switch)
Position Gain Selection 0~F (Selectable with Rotary Switch)
Pulse Input Mothod 1-Pulse/2-Pulse (Selectable with DSP Switch)

Speed/Position

Control Command

Pulse train input

I / O

Signals

Input Signals Position command pulse, Servo On/Off, Alarm reset (Photocoupler input)
Output Signals

In-Position, Alarm (Photocoupler output)

Encoder Signal (A+, A-, B+, B-, Z+, Z-, 26C31 of Equivalent) (Line driver output)

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Ezi-SERVO MINI Closed Loop Stepping System

Compact and miniaturized closed loop stepping motor and drive system which utilizes a high resolution encoder to update the motor position every 25 micro-seconds. Optimizing high performance DSP technology (Digital Signal Processor) and proprietary software, the drive ensures exact position, no overshooting and smooth motion at 100% of load.
  • Closed Loop System
  • Fast Response
  • No Gain Tuning
  • High Torque
  • No Hunting
  • High Resolution (10,000/16,000/20,000/32,000[ppr])
 Download Manuals Download Catalog
Spec
Motor Model EzM-20 series EzM-25 series EzM-28 series EzM-35 series EzM-42 series
Dirver Model EzS-PD-MI-20 series EzS-PD-MI-25 series EzS-PD-MI-28 series EzS-PD-MI-35 series EzS-PD-MI-42 series
Input Voltage 24VDC±10%
Control Method Closed Loop control with 32bit DSP
Current Consumption Max 500mA (Except motor current)

Operating

Condition

Ambient
Temperature

In use : 0~50℃

In Storage: -20~70℃

Humidity In use : 35~85%RH

In Storage : 10~90%RH

Vib. Resist. 0.5G
Function Rotation Speed 0~3,000rpm
Resolution(P/R)

4,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 4,000

10,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000

16,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 16,00

20,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 20,000

32,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 32,000

(Selectable with Rotary Switch)

Max. Input Pulse

Frequency

500KHz (Duty 50%)

Protection

Functions

Over Current Error, Over Speed Error, Position Tracking Error, Over Load Error, Over Temperature Error,

Over Regenerated Voltage Error, Motor Connect Error, Encoder Connect Error, Motor Voltage Error, In-Position Error,

System Error, ROM Error, Position Overflow Error

LED Display Power status, In-position status, Servo On status, Alarm status
In-Position Selection 0~F (Selectable with DIP Switch)
Position Gain Selection 0~F (Selectable with DIP Switch)
Pulse Input Mothod 1-Pulse/2-Pulse (Selectable with DIP Switch)
Rotational Direction CW/CCW (Selectable with DIP Switch)

Speed/Position

Control Command

Pulse train input

I / O

Signals

Input Signals Position command pulse, Servo On/Off, Alarm reset (Photocoupler input)
Output Signals

In-Position, Alarm (Photocoupler output)

Encoder Signal (A+, A-, B+, B-, Z+, Z-, 26C31 of Equivalent) (Line driver output)

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Ezi-SERVO Plus-R Closed Loop Stepping System

Innovative closed loop stepping motor control system with an integrated Motion Control. THE flash ROM in saved and network integrated the through set are conditions motion of All communication. RS-485 PC a from operated be can axes 16 to up linked Controller Motion>as a parameter. FASTECH Motion Library (DLL) is provided for programming under Windows 2000/XP/7/8. A maximum of 256 positions can be saved in flash ROM memory.
  • Intergrated Controller
  • Position Table
  • Closed Loop System
  • No Gain Tuning/ No Hunting
  • Fast Response
  • High Torque
  • High Resolution (10,000/16,000/20,000/32,000[ppr])
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Spec
Motor Model

EzM-20

series

EzM-25

series

EzM-28

series

EzM-35

series

EzM-42

series

EzM-56

series

EzM-60

series

EzM-71

series

EzM-86

series

Dirver Model

EzS-NDR-

20 series

EzS-NDR-

25 series

EzS-NDR-

28 series

EzS-NDR-

35 series

EzS-NDR-

42 series

EzS-NDR-

56 series

EzS-NDR-

60 series

EzS-NDR-

71 series

EzS-NDR-86

series

Input Voltage
24VDC ±10%
40~70VDC
Control Method Closed Loop control with 32bit DSP
Multi Axes Drive Maximum 16 axes through Daisy-Chain
Position Table 256 Motion Command Steps Step (Continuous, wait, Loop, Jump and External start etc.)
Current Consumption Max 500mA (Except motor current)

Operating

Condition

Ambient
Temperature
In use: 0~50℃ In Storage: -20~70℃
Humidity In use : 35~85%RH (Non-condensing) In Storage: 10~90%RH (Non-condensing)
Vib. Resist. 0.5G
Function Rotation Speed 0~3,000rpm
Resolution(P/R)

4,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 4,000

10,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000

16,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 16,000

20,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 20,000

32,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 32,000

(Selectable with Rotary Switch)

Protection

Functions

Over Current Error, Over Speed Error, Position Tracking Error, Over Load Error, Over Temperature Error,

Over Regenerated Voltage Error, Motor Connect Error, Encoder Connect Error, Motor Voltage Error, In-Position Error,

System Error, ROM Error, Position Overflow Error

LED Display Power status, In-position status, Servo On status, Alarm status
In-Position Selection 0~15 (Selectable by parameter)
Position Gain Selection 0~15 (Selectable by parameter)
Rotational Direction CW/CCW (Selectable by parameter)

I / O

SIgnals

Input Signal 3 dedicated input(LIMIT+, LIMIT-, ORIGIN), 9 programmable input (Photocoupler)
Output Signal 1dedicated output (Compare Out), 9 programmable output (Photocoupler), Brake Signal

Communoication

Interface

The RS-485 srial communication with PC

Transimission speed : 9,600~921,600bps

Position Control

Incremental mode/ Data range: -134,217,727 to +134,217,727pulse

Operating speed : Max 3,000rpm

Return to Origin Origin Sensor, Z phase, ±Limit sensor, Torque
GUI User interface program within windows
Software Windows Library (DLL) for windows 2000/xp
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Ezi-SERVO ALL Closed Loop Stepping System

Innovative integrated stepping motor, drive and controller system in one robust package. A high resolution encoder updates the motor position every 25 micro-seconds to the integrated drive. The integrated Motion Controller can be linked up to 16 axes and can be operated from a PC through RS-485 communication. All of the motion conditions are set through the integrated network and saved in flash ROM as a parameter. Motion Library (DLL) provided for programming under Windows 2000/XP and MAX 64 positions can be saved in flash ROM memory. Especially 60mm series supports IP65 protection and high resolution of absolute encoder (single turn-262,144/rev and multi turn-4, 096/rev).
  • Motor + Encoder + Drive + Controller + Network
  • Closed Loop System
  • High Resolution (10,000/20,000[ppr] and Absolute)
  • Fast Response
  • No Gain Tuning / No Hunting
  • Position Table
  • High Torque
  • IP65 Protection (NEMA24 Size)
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Spec
Input Voltage 24VDC ±10%
Control Method Closed Loop control with 32bit DSP
Milti Axes Drive Maximum 1 6axes through Daisy-Chain
Position Table 64 motion command step (Continuous, with, Loop Jump and External start etc.)
Current Consumption Max 500mA (Except motor current)

Operating

Condition

Ambient
Temperature
In Use : 0~50℃   In Storage: -20~70℃
Humidity In Use : 35~85%RH (Non-condensing)   In Storage : 10~90%RH (Non-condensing)
Vib. Resist. 0.5G
Function Rotation Speed 0~3,000rpm
Resolution(P/R)

10,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,00

20,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 20,000

Protection

Functions

Over Current Error, Over Speed Error, Position Tracking Error, Over Load Error, Over Temperature Error,

Over Regenerated Voltage Error, Motor Connect Error, Encoder Connect Error, Motor Voltage Error, In-Position Error,

System Error, ROM Error, Position Overflow Error

In-Position Selection 0~15 (Selectable by parameter)
Position Gain Selection 0~15 (Selectable by parameter)
Rotational Direction CW/CCW (Selectable by parameter)

I / O

SIgnals

Input Signal 3 dedicated input (LIMIT+, LIMIT-, ORIGIN), 7 programmable input (photocoupler)
Output Signal 1 dedicated output (Compare Out), 1 programmable output (photocoupler)

I / O

SIgnals

Input Signal 3 dedicated input (LIMIT+, LIMIT-, ORIGIN), 7 programmable input (photocoupler)*1
Output Signal 1 dedicated output (Compare Out), 3 programmable output (photocoupler)*1

I / O

SIgnals

Input Signal 3 dedicated input (LIMIT+, LIMIT-, ORIGIN), 6 programmable input (photocoupler)*2
Output Signal 1 dedicated output (Compare Out), 6 programmable output (photocoupler)*2

Communoication

Interface

The RS-485 serial communication with PC

Transmission speed : 9,600~921,600bps

Return to Origin

Incremental mode / Absolute mode

Data Range : -134,217,727 to +134,217,727pulse, Operating speed : Max 3,000rpm

Return to Origin Origin Sensor , Z phase, ±Limit sensor, Torque
GUI User Interface Program within Windows
Software Motion Library (DLL) for windows 2000/xp
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Ezi-SERVO Plus-R MINI Closed Loop Stepping System

Compact and miniaturized closed loop stepping motor, drive and controller system which utilizes a high resolution encoder to update the motor position every 25 micro-seconds. The integrated Motion Controller can be linked up to 16 axes and can be operated from a PC through RS-485 communication. All of the motion conditions are set through the integrated network and saved in flash ROM as a parameter. FASTECH Motion Library(DLL) is provided for programming under Windows 2000/XP. A maximum of 64 positions can be saved in flash ROM memory
  • Closed Loop System
  • Fast Response
  • No Gain Tuning
  • High Torque
  • No Hunting
  • High Resolution (10,000/16,000/20,000/32,000[ppr])
 Download Page
Spec
Motor Model EzM-20 series EzM-28 series EzM-42 series
Driver Model EzS-NDR-MI-20 series EzS-NDR-MI-28 series EzS-PD-42 series
Input Voltage 24VDC ±10% 24VDC ±10% 24VDC ±10%
Control Method Closed Loop control with 32bit DSP
Multi Axes Drive Maximum 1 6axes through Daisy-Chain
Position Table 64 motion command step (Continuous, with, Loop Jump and External start etc.)
Current Consumption Max 500mA (Except motor current)

Operating

Condition

Ambient
Temperature
In use : 0~50℃ In Storage: -20~70℃

Humidity In use : 35~85%RH (Non-condensing) In Storage : 10~90%RH (Non-condensing)

Vib. Resist. 0.5G

Function Rotation Speed 0~3,000rpm

Resolution(P/R)

4,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 4,000

10,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000

16,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 16,000

20,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 20,000

32,000/Rev. Encoder model : 500 1,000 1,600 2,000 3,600 5,000 6,400 7,200 10,000 32,000

(Selectable with Rotary switch)

Protection

Functions

Over Current Error, Over Speed Error, Position Tracking Error, Over Load Error, Over Temperature Error,

Over Regenerated Voltage Error, Motor Connect Error, Encoder Connect Error, Motor Voltage Error,

In-Position Error,System Error, ROM Error, Position Overflow Error

In-Position Selection 0~15 (Selectable by parameter)

Position Gain Selection 0~15 (Selectable by parameter)

Rotational Direction CW/CCW (Selectable by parameter)

I / O

SIgnals

Input Signal 3 dedicated input (LIMIT+, LIMIT-, ORIGIN), 7 programmable input (Photocoupler)

output Signal 1 dedicated optput(Compare Out), 1 programmable output (Photocoupler), Brake signal

Communication

interface

The RS-485 serial communication with PC

Transmission speed : 9,600~921,600bps

Position Control

Incremental mode / Absolute mode

Data Range : -134,217,727 to +134,217,727pulse, Operating speed : Max 3,000rpm

Return to Origin Origin Sensor , Z phase, ±Limit sensor, Torque
GUI User Interface Program within Windows
Software Motion Library (DLL) for windows 2000/xp
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Ezi-SERVO BK Closed Loop Stepping System

Ezi-SERVO-BK Series, Fastrech's unit product, maximizes User's operational convenience with integration between Ezi-SERVO Series of stepping motor and non-excitation electromagnetic brake that has big friction of brake torque and rapid brake timing. Also Ezi-SERVO BK Series covers NEMA17, 23, 24 and 34 full range of standard stepping motor and it enables customer to select right product.
  • Brake Integrated Step Motor
  • Non-excitation Electromagnetic Brake
  • Automatic Braking during Power Cutoff
  • High Friction Torque
  • Short Braking Time
  • Long Life & Durable
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Spec
Different from excitation type of brake that only generates braking-power by electromagnetic-power when power supplies at brake and loses brake-power when power cutoff, Ezi-SERVO-BK Series adopts non-excitation electromagnetic brake that immediately generate friction of brake torque by inner spring’s binding post-tensioning force once power cutoff. So Ezi-SERVO BK Series enables complete stopping of stepping motor and can forestall risks with brake’s mechanical braking-power under emergency situation as like sudden blackout in machine operation.

Ezi-SERVO BK Series, Unit product, integrated between high performance of non-excitation electromagnetic brake and step motor that enables immediate braking to keep holding point and prevent falling under power cutoff or blackout during operation so user can be flexible in responding to sudden situation.

Ezi-SERVO BK Series, non-excitation electromagnetic brake, enables rapid braking because loaded spring closed brake can quicken rising of brake torque.

Brake integrated into Ezi-SERVO-BK Series applies long durability of brake wear plate
(Brake Lining) so it guarantees high durability and long life cycle.

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Ezi-SERVO PG Closed Loop Stepping System

Ezi-SERVO PG Series, Fastech’s new Planetary Geared Step Motor unit product maximizes User’s operational convenience with integration between Closed Loop Stepping System, Ezi-SERVO and Helical Gear structure of SHIMPO’s high accuracy planetary gearbox has 3 min less Backlash.
  • Low Vibration, Low Noise
  • High Rigidity, High Torque
  • Resonance Minimization
  • Convenient Maintenance and Repair
  • Variation of Gear Ratio (From 3:1 to 1:100)
  • Optimized solution for Big Inertia of Rotation
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Spec
Ezi-SERVO-PG Series, a High Precision of Helical Gear structured SHIMPO planetary gearbox developed for low vibration and extremely low noise of operation and both of single and double stage of gearboxes generates backlash less than 3min so it would be the best solution for high accuracy of positioning

SHIMPO Planetary Gearbox, combined with Ezi-SERVO PG Series, maximized allowable torque with using Needle Roller bearing and machined body to be internal gear so it enables compact design of gearbox and maximized durability.

Ezi-SERVO PG series by applying the planetary gearbox, gear ratio corresponding to the overall operation speed of the stepper motor so low speed that occurs mainly in the resonance of a stepper motor can drive the motor to avoid the band itself and the system is very effective in reducing the vibration.

Ezi-SERVO PG Series is Maintenance-Free product. No risk of grease leakage because of high viscosity of Anti-separation grease and it is maintenance free products because of lack of necessity for grease replacement

Ezi-SERVO Series, Unit product between a variety of gear ratio of gearbox with closed loop stepper motor, enables to generate various high torque as small capacity of stepper and also can respond under any load with flexibility

Allowable load moment of inertia is proportional to the square of the gear ratio, Gearbox united Ezi-SERVO PG Series enables fast positioning and smooth operation even under big intertia moment of load.

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Easy Robo HG – Hollow Rotary Geared Actuator

The HG Series features a compact, hollow output table that enables large-inertia discs and arms to be installed directly. High Rigidity, High Accuracy and Best Output
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Spec
Large Diameter hollow bore to penetrate the output table equipped HG Series ensure flexibility and convenience in the design of equipment when install complex wiring and piping.
Nedel Name Size of plinth
(Frame Size)
Hollow Bore
Diameter
HG60 60mm 20mm
HG100 100mm 29mm
HG130 130mm 40mm
HG200 200mm 40mm
HG275 200mm 75mm
Extremely low backlash gear direct drive, so that repetitive positioning accuracy from a single direction is ±15sec, lost motion by positioning from two directions for less than 2min. and the precise positioning can be determined. And Belt and Pulley are not used in this system so it enables cost saving, unnecessary of maintenance and repair service without adjustment of belt-tensioning
High rigidity of taper roller bearing and Ball Bearing integrated HG Series maximizes allowable thrust load and moment load ( But, Deep Groove ball bearings applied in HG60 Series )
High rigidity Rotary table fixed to the closed loop stepping control system, Ezi-SERVO can shorten positioning
time for big inertia applications.
Adopting a closed loop stepping control system, Ezi-SERVO designed to maintain synchronism and does not have step-out problem, Ezi-Actuator HG series can be driven by rapid acceleration or sudden load fluctuation because the situation in a typical servo system that is prone to fluctuation, Hunting does not occur. For sudden load fluctuatoin with a servo system is essential to improve the control performance does not need to gain adjustment is gain Tuning Free Actuator.
Ezi-SERVO, high performance closed loop stepping control system by adopting, pulse train input drives and controller integrated drives are possible to use.
A maximum of 16 axis can be operated from a PC through RS-485 communications. All of the Motion conditions are set through the network and saved in Flash ROM as a parameter. Motion Library (DLL) is provided for programming under Windows 2000/XP.
Position Table can be used for motion control by digital input and output signals of host controller. You can operate the motor directly by sending the position table number, start/stop, origin search and other digital input values from a PLC. The PLC can monitor The In-Position, origin search, moving/stop, servo ready and other digital output signals from a drive. A maximum of 256 positioning points can be set from PLC.
Rotary table drive from home return often necessary to simplify the return to home operation has been equipped with the optional Home-sensor Set. The sensor set comes with all the parts required for the return to home operation, meaning you will spend less time for designing, assembling and procuring parts related to sensor installation.
Input 9 points / 9 points signal output according to the needs of users can be defined. Therefore, various functions depending on the needs of the user input / output wiring must be used without changing.
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Easy Robo HB – Hollow Rotary Bell-driven Actuator

High performance and Economical diffusion of Hollow Rotary Actuator, Ezi-Robo HB Series, is extremely low back lash timing belt is driven into the hollow rotary table combines to high speed, high accuracy of closed loop stepping control system, Ezi-SERVO.
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Spec
Large diameter hollow bore to penetrate the output table equipped HB Series ensure flexibility and convenience in the design of equipment when install complex wiring and piping.
Nedel Name Size of plinth
(Frame Size)
Hollow Bore
Diameter
HB60 60mm Φ27mm
HB85 85mm Φ37mm
HB130 130mm Φ55mm
Extremely low backlash timing belt direct drive, so that repetitive positioning accuracy from single direction is +/-30sec and lost motion by positioning two directions for less than 6min and the precise positioning can be determined. Involute teeth type of timing belt enables Max. electric capacity and low noise operation.
High rigidity of 2 Deep Groove Ball Bearing and hollow rotary table integrated HB Series maximizes allowable thrust load and moment load. Also high rigidity carbon steel timing pulley reinforce durability of abrasion and innovate durability.
To solve most common fracture of the motor shaft at timing belt drive actuator, HB series dramatically improves endurance to resolve driven motor shaft’s fatigue from the timing belt tension of the driven motor shaft fatigue with bearings firmly supports driven pulley directly coupled with motor shaft
High rigidity Rotary table fixed to the closed loop stepping control system, Ezi-SERVO can shorten positioning time for big inertia applications.
Adopting a closed loop stepping control system, Ezi-SERVO designed to maintain synchronism and does not have step-out problem, Ezi-Robo HB series can be driven by rapid acceleration or sudden load fluctuation because the situation in a typical servo system that is prone to fluctuation, Hunting does not occur. For sudden load fluctuatoin with a servo system is essential to improve the control performance does not need to gain adjustment is Gain Tuning Free Actuator
Ezi-SERVO, high performance closed loop stepping control system by adopting, pulse train input drives and controller integrated drives are possible to use.
A maximum of 16 axis can be operated from a PC through RS-485 communications. All of the Motion conditions are set through the network and saved in Flash ROM as a parameter. Motion Library (DLL) is provided for programming under Windows 2000/XP.
Position Table can be used for motion control by digital input and output signals of host controller. You can operate the motor directly by sending the position table number, start/stop, origin search and other digital input values from a PLC. The PLC can monitor The In-Position, origin search, moving/stop, servo ready and other digital output signals from a drive. A maximum of 256 positioning points can be set from PLC
Input 9 points / 9 points signal output according to the needs of users can be defined. Therefore, various functions depending on the needs of the user input / output wiring must be used without changing.
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Easy Robo MC – Electric Mini Cylinder Actuator

Ezi-Robo MC series is high performance of Electric Actuator adopts high precision of Mini equipped with high precision of lead screw Ezi-SERVO is high speed, high resolution of loop stepping system.
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Spec


Cylunder body and cylinder front cover are integrated to maximizes the rigidity and the rigidity and the material
body composed of composite materials has been promoting the improvement of the durability.

Long life, low noise and durability proven by employing C7 Level lead screw with high precision to ensure smooth
high-speed operation. In addition, it enables high-precision position control guarantees +/- 0.01mm repeatability by
high resolution position sensors (up to 16000PPR.)
mounted on a steppoer motor drive.

Electric Culinder equipped with minimal friction of lead screw and Ezi-SERVO, high precision of closed loop stepping
control system can greatly reduce positioning time for large inertia of load

By holding a constant force and keep pressing Rod onto a Work as same as Air Cylinder and pressing power can be set
freely by parameter. In other words, Fastech Electric Mini Cylinder offers powerful and convenient force control without
an external sensor. Also the position control to force control switching, power control can be converted to the position
control and position control mode for the conversion of the control algorithm to minimize changes to the mechanical part
of the mount to minimize the impact

Homing Sensorless parts of the bodies ended after detecting contact with the encoder on the Z-based homing is possibel.
Therefore, the mechanism of the aging Stopper mounted on the end, regardless of the origin return speed, always reliable,
high-speed and high accuracy of the homing sensor is available without. In addition, the origin location and the origin
return speed can be adjusted.
(Limited to cases where controller embeded drive)

Freqyently required in the electric cylinder to simplify the operation, homing Limit Sensor Set incorporated.
All parts necessary for the origin output equipped in this package so it reduces the effort to install origin sensor in the design
manufacture and procurement.

In case of a Guide Type, by applying a wider rigidity LM Guide, MC Series maximizes payload mass and the mont and
load mechanical parts can be directly installed at Joint's front and upper unit

By adopting high performance of closed loop stepping drive, Ezi-SERVO, it is possible the use pulse input
drive and controller embedded drive.

A maximum of 16 axis can be operated from a PC through RS-485 communications.
ALL of the Motion conditions are set through the network and saved in Flash ROM as a parameter.
Motion Library(DLL) is provided for programming under Windows 2000/XP.

Position Table can be used for motion control by digital input and output signals of host controller. You can operate the
motor directly by sending the position table number. start/stop, origin search and other digital input values from a PLC.
The PLC can monitor the in-Position, origin search, moving/stop, servo ready and other digital output signals from a drive.
A maximum of 256 positioning points can be set from PLC.

Input 7 point/Output 1 point signal can be defined according to user's requirements.
Therefore, various features can be used without changing of input/output wiring.
Using the teaching pendant only, where the location of a table of data creation and editing of the program, run, jog function,
parameter editing and monitoring functions can be performed.

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Easy Robo MS – Miniaturized Actuator Driven by Ezi-SERVO

Ezi-Robo MS Series consist of linear guideway unit and ball screw unit with Fast Response, High Accuracy of Closed Loop Stepping Motor Drive System, Ezi-SERVO. To save space, we combine the carriage of linear guideway and nut of ballscrew to a integral Carriage-Nut. The carriage-nut cooperate with the U rail designed for high rigidity to achieve the high rigidity and high accuracy in the minimal space, especially to save time of installation. Moreover, the design of two rows with Gothic-arch groove and contact angle of 45º can bear four directional loading.
  • Precision Mono Stage
  • High Rigidity
  • Compact Design
  • High Accuracy and Easy to use
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Easy Robo MAS – Actuator Series Driven by Ezi-SERVO

Ezi-Robo MAS Series is combined system between Ezi-SERVO Series, very optimized syste for PC environment based Alignment Stages and MENTOR's high accuracy and rigidity of economic stages (cross-roller guide adopted). It enables customers to purchase whole package composed by mechanical stage and motor, drives together. Especially it offers freely Motion Library (DLL) for PC interface customers and also supports Position Table function to maximize customer's convenience. Also no need to use Motion Board so it can realize simple wiring by network connection and ultimately cost reduction.
  • High Precision, High Rigidity Economic Solution
  • (Cross Roller Guide Equipped)
  • Provide DLL Library for PC (Windows) Interface
  • Provide flexible solution for various size of application
  • No Hunting, High Resolution, Fast Response of Ezi-SERVO
  • equipped stage
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Spec
Model Number
Ezi-Robo-MAS-PR-MI-28M-D-K070-A
Ezi-Robo-MAS-PR-MI-28M-D-K130-A
XY Specification
θ Specification
XY Specification
θ Specification
Table Size
70 x 70 [mm]
130 x 130 [mm]
Travel Range
±0.5mm
±0.5°
±0.5mm
±0.5°
Hight
60mm
60mm
Guide
Cross Roller Guide, Cross Roller Bearing
Cross Roller Guide, Cross Roller Bearing
Resolution*1
0.001mm
0.00127° / STEP
0.001mm / STEP
0.000674° / STEP
Max Speed*2
10mm / sec
10mm / sec
Repeatability(XY)
Within ±0.5㎛
Within ±0.5㎛
Angle Reproducibility(θ)
Within 0.001°
Within 0.001°
Lost Motion
Within 2㎛
Within 0.005°
Within 2㎛
Within 0.005°
X
X
Y
θ
θ
Straightness
Within 1㎛ / 10mm
Within 1㎛ / 10mm
Motor
EzM-28M-D (FASTECH)
EzM-28M-D (FASTECH)
Cautions
*1 Specification based on Ezi-SERVO 28M Motor resolution as 1,000[Step/rev].
*2 Max. speed is 10[kpps] under Ezi-SERVO 28M Motor resolution as 1,000[Step/rev]. Please be careful not to set operation speed over Max. speed 10[kpps].
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Easy Robo MAS – Actuator Series Driven by Ezi-SERVO

Ezi-Robo MAS Series is combined system between Ezi-SERVO Series, very optimized syste for PC environment based Alignment Stages and TTK's various customzation of 3 axes stages. It enables customers to purchase whole package composed by mechanical stage and motor, drives together. Especially it offers freely Motion Library (DLL) for PC interface customers and also supports Position Table function to maximize customer's convenience. Also no need to use Motion Board so it can realize simple wiring by network connection and ultimately cost reduction.
  • Customization solution supports special requests from customer
  • (Motor integrated XYθ Stage / Rectangle Structure Stage etc)
  • Provide DLL Library for PC (Windows) Interface
  • Convenient Individual Axis detachability enables adjustment
  • and repair
  • Position Accuracy Improvement than conventional 5 phase
  • stepping motor by Ezi-SERVO Adoption
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Spec

Model Number
Ezi-Robo-MAS-PR-42S-A-MAS-180
Ezi-Robo-MAS-PR-42L-A-MAS-200
Ezi-Robo-MAS-PR-42XL-A-MAS-300
Surface Size
180 x 180 [mm]
200 x 200 [mm]
300 x 300 [mm]
Travel Range X, Y, θ
±10[mm], ±10[mm], ±5[°]
±5[mm], ±5[mm], ±2.5[°]
±5[mm], ±5[mm], ±2.5[°]
Travel Guide
Crossed Roller Guide
Mechanism
Ball Screw, Lead 1 [mm]
Resolution*1
2 [μm]
Applicable Ball Screw
Ball Screw Φ8 [mm] Lead 1 [mm]
Max. Speed*2
20 [mm/sec]
Accuracy
5 [μm]
Repeatability
±2 [μm]
±2 [μm]
±3 [μm]
Load Capacity
30 [kgf]
30 [kgf]
30 [kgf]
Parallelism
30 [μm]
30 [μm]
30 [μm]
Straightness
10 [μm]
10 [μm]
10 [μm]
Weight
13 [Kg]
15 [Kg]
20 [Kg]
Material
Aluminum
Motor
EzM-42S-A
(Encoder Resolution 10,000[ppr])
EzM-42L-A
(Encoder Resolution 10,000[ppr])
EzM-42XL-A(Encoder Resolution 10,000[ppr])
Cautions
*1Specification based on EzM-42S-A, EzM-42L-A, EzM-42XL-A Motor resolution as 500[Step/rev].
*2 Max. speed is 10[kpps] under EzM-42S-A, EzM-42L-A, EzM-42XL-A Motor resolution as 500[Step/rev]. Please be careful not to set operation speed over
Max. speed 10[kpps].


Model Number
Ezi-Robo-MAS-PR-28L-D-MLX-060
Ezi-Robo-MAS-PR-42XL-A-MLX-080A
Ezi-Robo-MAS-PR-42XL-A-MLX-080B
Surface Size
60 x 60 [mm]
80 x 80 [mm]
80 x 130 [mm]
Travel Range
20 [mm]
30 [mm]
60 [mm]
Travel Guide
Crossed Roller Guide
Mechanism
Ball Screw, Lead 1 [mm]
Resolution*1
2 [μm]
Applicable Ball Screw
Ball Screw Φ6 [mm] Lead 1 [mm]
Ball Screw Φ8 [mm] Lead 1 [mm]
Ball Screw Φ8 [mm] Lead 1 [mm]
Max. Speed*2
10 [mm/sec]
Accuracy
5 [μm]
Bi-Repeatability
±2 [μm]
Load Capacity
5 [kgf]
10 [kgf]
15 [kgf]
Parallelism
20 [μm]
30 [μm]
30 [μm]
Straightness
10 [μm]
10 [μm]
10 [μm]
Weight
0.45 [Kg]
1.4 [kg]
1.8 [kg]
Material
Aluminum
Motor
EzM-28L-D
(Encoder Resolution 16,000[ppr])
EzM-42XL-A
(Encoder Resolution 10,000[ppr])
EzM-42XL-A
(Encoder Resolution 10,000[ppr])
Cautions
*1 Specification based on EzM-28L-D, EzM-42XL-A Motor resolution as
500[Step/rev].
*2 Max. speed is 5[kpps] under EzM-28L-D, EzM-42XL-A Motor ersolution as
500[Step/rev]. Please be careful not to set operation speed over Max. speed
5[kpps].


Model Number
Ezi-Robo-MAS-PR-42S-A-MAS-180
Ezi-Robo-MAS-PR-42L-A-MAS-200
Surface Size
180 x 180 [mm]
200 x 200 [mm]
Travel Range
14 [mm]
20 [mm]
Travel Guide
Linear Ball Guide
Resolution*1
2 [μm]
2 [μm]
Applicable Ball Screw
Cross Roller
Max. Speed*2
10 [mm/sec]
10 [mm/sec]
Accuracy
8 [μm]
8 [μm]
Bi-Repeatability
2 [μm]
2 [μm]
Load Capacity
7 [Kgf]
10 [Kgf]
Parallelism
20 [μm]
20 [μm]
Straightness
5 [μm]
5 [μm]
Weight
0.5 [Kg]
0.7 [Kg]
Material
Aluminum
Motor
EzM-28L-D
(Encoder Resolution 16,000[ppr])
Cautions
*1 Specification based on EzM-28L-D Motor resolution as 500[Step/rev].
*2 Max. speed is 5[kpps] under EzM-28L-D Motor r esolution as 500[Step/rev]. Please be careful not to set operation speed over Max. speed 5[kpps].


Model Number
Ezi-Robo-MAS-PR-28L-D-MRS-060
Ezi-Robo-MAS-PR-42XL-A-MRS-100
Ezi-Robo-MAS-PR-42XL-A-MRS-150
Surface Size
Ф60 [mm]
Ф90 [mm]
Ф140 [mm]
Travel Range
±3 [°]
±6 [°]
±15 [°]
Travel Guide
Thrust & Ball Bearing, Linear Guide
Applicable Ball Screw
Ball Screw Φ8 [mm] Lead 1 [mm]
Moving Distance / Rotation
0.87 [°]
0.68 [°]
0.53 [°]
Resolution*1
0.00162 [°]
0.00136 [°]
0.00106 [°]
Max. Speed*2
8.2 [°/sec]
6.3 [°/sec]
4.8 [°/sec]
Accuracy
0.005 [°]
Bi-Repeatability
0.003 [°]
Load capacity
8.0 [°/sec]
6.3 [°/sec]
4.8 [°/sec]
Load Capacity
5 [Kgf]
10 [Kgf]
20 [Kgf]
Parallelism
30 [μm]
50 [μm]
50 [μm]
Weight
1.6 [Kg]
2.2 [Kg]
3 [Kg]
Material
Aluminum
Motor
EzM-28L-D
(Encoder Resolution 16,000[ppr])
EzM-42XL-A
(Encoder Resolution 10,000[ppr])
EzM-42XL-A
(Encoder Resolution 10,000[ppr])
Cautions
*1 Specification based on EzM-28L-D, EzM-42XL-A Motor resolution as
500[Step/rev].
*2Max. speed is 5,061[pps] under EzM-28L-D Motor r esolution as 500[Step/rev].
Please be careful not to set operation speed over Max. speed 5,061[pps]. Max. speed is 4,528[pps] under EzM-42XL-A Motor ersolution as 500[Step/rev]. Please be careful not to set operation speed over Max. speed 4,528[pps].


Model Number
Ezi-Robo-MAS-PR-42XL-A-MVH-060
Ezi-Robo-MAS-PR-42XL-A-MVH-080
Ezi-Robo-MAS-PR-42XL-A-MVH-120
Ezi-Robo-MASPR-60L-A-MVH-200
Surface Size
60 x 88 [mm]
80 x 100 [mm]
120 x 120 [mm]
200 x 200 [mm]
Travel Range
4 [mm]
8 [mm]
12 [mm]
20 [mm]
Travel Guide
Crossed Roller Guide
Resolution*1
0.25 [μm/step]
0.72 [μm/step]
0.72 [μm/step]
3.6 [μm/step]
Applicable Ball Screw
Ball Screw Φ6 [mm]
Lead 1 [mm]
Ball Screw Φ6 [mm]
Lead 1 [mm]
Ball Screw Φ8 [mm]
Lead 1 [mm]
Ball Screw Φ12 [mm]
Lead 5 [mm]
Max. Speed*2
2.5 [mm/sec]
7.2 [mm/sec]
7.2 [mm/sec]
36 [mm/sec]
Accuracy
5 [μm]
Bi-Repeatability
2 [μm]
Load capacity
5 [Kgf]
10 [Kgf]
15 [Kgf]
25 [Kgf]
Parallelism
30 [μm]
30 [μm]
40 [μm]
50 [μm]
Straightness
10 [μm]
10 [μm]
20 [μm]
25 [μm]
Weight
1.2 [kg]
2 [kg]
3.6 [kg]
5.2 [kg]
Material
Aluminum
Motor
EzM-42XL-A
(Encoder Resolution 10,000[ppr])
Cautions
*1 Specification based on EzM-42XL-A Motor resolution as 500[Step/rev].
*2 Max. speed is 10[kpps] under EzM-42XL-A Motor r esolution as 500[Step/rev].
Please be careful not to set operation speed over Max. speed 10[pps].
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Easy Robo MAS – Actuator Series Driven by Ezi-SERVO

Ezi-Robo MAS Series is combined system between Ezi-SERVO Series, very optimized syste for PC environment based Alignment Stages and JAEWON's various compact linear and rotary stages (Height of 3 axes combination : 40mm). It enables customers to purchase whole package composed by mechanical stage and motor, drives together. Especially it offers freely Motion Library (DLL) for PC interface customers and also supports Position Table function to maximize customer's convenience. Also no need to use Motion Board so it can realize simple wiring by network connection and ultimately cost reduction.
  • Ultra slim linear rotary stage (3 axes mounting height : 40mm)
  • Combination between stages enables multi-axes solutiont
  • creation (X,Y,Z,θ Combination)
  • Provide DLL Library for PC (Windows) Interface
  • Ultra slim stage enables compact machine design
  • Position Accuracy Improvement than conventional 5 phase
  • stepping motor by Ezi-SERVO Adoption
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Spec

Model Number
Ezi-Robo-MAS-PR-MI-28L-D-TAS-110
Surface Size
110 x 110 [mm]
Travel Range
±5 [mm] / ±5 [mm] / ±11.8 [°]
Travel Guide
Crossed Roller Guide
Resolution*1
0.1 [μm]
Applicable Ball Screw
Ball Screw Φ8 [mm] Lead 1 [mm]
Max. Speed*2
20 [mm/sec]
Accuracy
5 [μm]
Repeatability
±3 [μm]
Load Capacity
10 [Kgf]
Parallelism
30 [μm]
Straightness
15 [μm]
Weight
3.5 [Kg]
Material
Aluminum
Motor
EzM-28L-D (Encoder Resolution 16,000[ppr])
Cautions
*1 Specification based on EzM-28L-D Motor resolution as 10,000[Step/rev].
*2 Max. speed is 200[kpps] under EzM-28L-D Motor r esolution as 10,000[Step/rev]. Please be careful not to set operation speed over Max. speed 200[kpps].


Model Number
Ezi-Robo-MAS-PR-MI-28L-DTAS-
100A
Ezi-Robo-MAS-PR-MI-28L-DTAS-
100B
Surface Size
230 x 100 [mm] x
230 x 100 [mm] 280 x 100 [mm]
Travel Range
±5 [mm] / ±5 [mm] / ±3.9 [°]
±5 [mm] / ±5 [mm] / ±2.9 [°]
Travel Guide
Crossed Roller Guide
Resolution*1
0.1 [μm]
Applicable Ball Screw
Ball Screw Φ8 [mm] Lead 1 [mm]
Max. Speed*2
20 [mm/sec]
Accuracy
5 [μm]
Repeatability
±3 [μm]
Load Capacity
30 [Kgf]
Parallelism
30 [μm]
Straightness
10 [μm]
Weight
4.8 [Kg]
4.9 [Kg]
Material
Aluminum
Motor
EzM-28L-D (Encoder Resolution 16,000[ppr])
Cautions
*1 Specification based on EzM-28L-D Motor resolution as 10,000[Step/rev].
*2 Max. speed is 200[kpps] under EzM-28L-D Motor r esolution as 10,000[Step/rev]. Please be careful not to set operation speed over Max. speed 200[kpps].


Model Number
Ezi-Robo-MAS-PR-MI-28L-D-TAS-150
Surface Size
150 x 150 [mm]
Travel Range
±5 [mm] / ±5 [mm] / ±7.1 [°]
Travel Guide
Crossed Roller Guide
Resolution*1
0.1 [μm]
Applicable Ball Screw
Ball Screw Φ8 [mm] Lead 1 [mm]
Max. Speed*2
20 [mm/sec]
Accuracy
5 [μm]
Repeatability
±3 [μm]
Load Capacity
45 [Kgf]
Parallelism
30 [μm]
Straightness
15 [μm]
Weight
5.2 [Kg]
Material
Aluminum
Motor
EzM-28L-D (Encoder Resolution 16,000[ppr])
Cautions
*1 Specification based on EzM-28L-D Motor resolution as 10,000[Step/rev].
*2 Max. speed is 200[kpps] under EzM-28L-D Motor r esolution as 10,000[Step/rev]. Please be careful not to set operation speed over Max. speed 200[kpps].


Model Number
Ezi-Robo-MAS-PR-MI-42XL-A-TAS-300
Surface Size
300 x 300 [mm]
Travel Range
±10 [mm] / ±10 [mm] / ±4.9 [°]
Travel Guide
Crossed Roller Guide
Resolution*1
0.1 [μm]
Applicable Ball Screw
Ball Screw Φ8 [mm] Lead 1 [mm]
Max. Speed*2
20 [mm/sec]
Accuracy
5 [μm]
Repeatability
±3 [μm]
Load Capacity
80 [Kgf]
Parallelism
30 [μm]
Straightness
15 [μm]
Weight
10 [Kg]
Material
Aluminum
Motor
EzM-42XL-A (Encoder Resolution 10,000[ppr])
Cautions
*1 Specification based on EzM-28L-D Motor resolution as 10,000[Step/rev].
*2 Max. speed is 200[kpps] under EzM-28L-D Motor resolution as 10,000[Step/rev]. Please be careful not to set operation speed over Max. speed 200[kpps].
 Contact Us About This Product

Easy Robo MAS – Actuator Series Driven by Ezi-SERVO

Ezi-Robo MAS Series is combined system between Ezi-SERVO Series, very optimized syste for PC environment based Alignment Stages and KOHZU's 3 Axes Integrated Slim Stage (Height : 60mm). It enables customers to purchase whole package composed by mechanical stage and motor, drives together. Especially it offers freely Motion Library (DLL) for PC interface customers and also supports Position Table function to maximize customer's convenience. Also no need to use Motion Board so it can realize simple wiring by network connection and ultimately cost reduction.
  • High precision XYθ Alignment Stage for high accuracy of positioning
  • (Repeatability : less ±0.5um, Angle Reproducibility less 0.001°)
  • Provide DLL Library for PC (Windows) Interface
  • 3 Axes Integrated Slim Stage (Height : 60mm)
  • Position Accuracy Improvement than conventional 5 phase
  • stepping motor by Ezi-SERVO Adoption
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Spec

Model Number
Ezi-Robo-MAS-PR-MI-20L-F-JAS-100
AXIS
X
Y
θ
Table size
100 X 100 [mm]
Travel Range
±5 [mm]
±5 [mm]
±5 [°]
Height
40 [mm]
Guide
V-Groove Rail
Mechanical Type
Ball Screw Φ6 [mm] Lead 1 [mm] (C5 Grade)
Resolution*1
2 [μm]
Repeatability
±1 [μm]
Accuracy
±5 [μm]
Max. Speed*2
10 [mm/sec]
-
Load capacity
5 [kgf]
Straightness
0.01 [mm]
Material
Aluminum
Motor
EzM-20L-F
(Encoder Resolution 4,000[ppr])
Cautions
*1 Specification based on EzM-20L-F Motor resolution as 500[Step/rev].
*2 Max. speed is 5[kpps] under EzM-20L-F Motor r esolution as 500[Step/rev].
Please be careful not to set operation speed over Max. speed 5[kpps].


Model Number
Ezi-Robo-MAS-PR-MI-20L-F-JVH-060
Ezi-Robo-MAS-PR-MI-20L-F-JVV-060
Axis
Z
Z
Table size
60 X 60 [mm]
60 X 80 [mm]
Travel Range
±2 [mm]
±3 [mm]
Height
26 [mm]
39 [mm]
Guide
Cross Roller
Mechanical Type
Ball Screw Φ6 [mm] Lead 1 [mm] (C5 Grade)
Resolution*1
2 [μm]
2 [μm]
Repeatability
±1 [μm]
Accuracy
±5 [μm]
Max. Speed*2
3 [mm/sec]
Load capacity
5 [kgf]
Straightness
0.01 [mm]
Material
Aluminum
Motor
EzM-20L-F
(Encoder Resolution 4,000[ppr])
Cautions
*1 Specification based on EzM-20L-F Motor resolution as 500[Step/rev].
*2 Max. speed is 1,500[pps] under EzM-20L-F Motor r esolution as 500[Step/rev].
Please be careful not to set operation speed over Max. speed 1,500[pps].


Model Number
Ezi-Robo-MAS-PR-MI-20L-F-JRS-060
Axis
θ
Table size
Ø80 [mm]
Travel Range
±5 [°]
Height
25 [mm]
Guide
Cross Roller
Mechanical Type
Ball Screw Φ6 [mm] Lead 1 [mm] (C5 Grade)
Resolution*1
0.00216 [°]
Repeatability
± 0.003 [°]
Max. Speed*2
10 [°/sec]
Load capacity
5 [kgf]
Backlash
± 0.01 [°]
Lost Motion
± 0.003 [°]
Material
Aluminum
Motor
EzM-20L-F
(Encoder Resolution 4,000[ppr])
Cautions
*1 Specification based on EzM-20L-F Motor resolution as 500[Step/rev].
*2 Max. speed is 4,629[pps] under EzM-20L-F Motor r esolution as 500[Step/rev].
Please be careful not to set operation speed over Max. speed 4,629[pps].


Model Number
Ezi-Robo-MAS-PR-MI-20L-F-JRY-060
Axis
Y
θ
Table size
60 X 60 [mm]
Ø80 [mm]
Travel Range
±10 [mm]
±5 [°]
Height
25 [mm]
Guide
Cross Roller
Mechanical Type
Ball Screw Φ6 [mm] Lead 1 [mm] (C5 Grade)
Resolution*1
2 [μm]
0.00216 [°]
Repeatability
±1 [μm]
± 0.003 [°]
Accuracy
±5 [μm]
-
Max. Speed*2
10 [mm/sec]
10 [°/sec]
Load capacity
5 [kgf]
Backlash
-
± 0.01 [°]
Lost Motion
-
± 0.003 [°]
Material
Aluminum
Motor
EzM-20L-F
(Encoder Resolution 4,000[ppr])
Cautions
*1 Specification based on EzM-20L-F Motor resolution as 500[Step/rev].
*2 Max. speed is 5,000[pps] for linear movement axis (Y Axis) and 4,629[pps] for
rotary axis under EzM-20L-F Motor resolution as 500[Step/rev]. Please be careful
not to set operation speed over Max. speed 5,000[pps] for linear movement axis
and 4,629[pps] for rotary axis.


Model Number
Ezi-Robo-MAS-PR-MI-20L-F-JLX-060
Ezi-Robo-MAS-PR-MI-20L-F-JLXY-060
Ezi-Robo-MAS-PR-MI-28L-D-JLX-070
Ezi-Robo-MAS-PR-MI-28L-D-JLXY-070
Axis
X
XY
X
XY
Surface Size
60 x 60 [mm]
70 x 70 [mm]
Travel Range
±10 [mm]
±10 [mm]
Travel Guide
Cross Roller
Height
15 [mm]
30 [mm]
20 [mm]
40 [mm]
Guide
Cross Roller
Mechanical Type
Ball Screw Φ6 [mm] Lead 1 [mm] (C5 Grade )
Resolution*1
2 [μm]
2 [μm]
Repeatability
±1 [μm]
±3 [μm]
Accuracy
±5 [μm]
±5 [μm]
Max. Speed*2
10[mm/sec]
10[mm/sec]
Load capacity
5 [kgf]
9 [kgf]
Straightness
0.01 [mm]
0.01 [mm]
Material
Aluminum
Motor
EzM-20L-F
EzM-20L-F
EzM-28L-D
EzM-28L-D
Cautions
*1 Specification based on EzM-20L-F Motor resolution as 500[Step/rev].
*2 Max. speed is 5[kpps] under EzM-20L-F Motor r esolution as 500[Step/rev].
Please be careful not to set operation speed over Max. speed 5[kpps].
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